검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electrodeposition of copper thin film on ruthenium - A potential diffusion barrier for Cu interconnects Chyan O, Arunagiri TN, Ponnuswamy T Journal of the Electrochemical Society, 150(5), C347, 2003 |
| No. | Article |
|---|---|
| 1 |
Electrodeposition of copper thin film on ruthenium - A potential diffusion barrier for Cu interconnects Chyan O, Arunagiri TN, Ponnuswamy T Journal of the Electrochemical Society, 150(5), C347, 2003 |