화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Shot noise models for sequential processes and the role of lateral mixing
Neureuther AR, Pease RFW, Yuan L, Parizi KB, Esfandyarpour H, Poppe WJ, Liddle JA, Anderson EH
Journal of Vacuum Science & Technology B, 24(4), 1902, 2006
2 Pattern noise in electron beam resists: PMMA, KRS-XE, TOK, HSQ
Miller MA, Poppe WJ, Neureuther AR, Liddle A, Harteneck B
Journal of Vacuum Science & Technology B, 24(6), 3025, 2006