검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering Kozak AO, Porada OK, Ivashchenko VI, Ivashchenko LA, Scrynskyy PL, Tomila TV, Manzhara VS Applied Surface Science, 425, 646, 2017 |
| 2 |
Characterization of SiCN thin films: Experimental and theoretical investigations Ivashchenko VI, Kozak AO, Porada OK, Ivashchenko LA, Sinelnichenko OK, Lytvyn OS, Tomila TV, Malakhov VJ Thin Solid Films, 569, 57, 2014 |
| 3 |
Peculiarities of preparing a-SiC : H films from methyltrichlorosilane Rusakov GV, Ivashchenko LA, Ivashchenko VI, Porada OK Applied Surface Science, 184(1-4), 128, 2001 |