검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High rate hot-wire chemical vapor deposition of silicon thin films using a stable TaC covered graphite filament Martin IT, Teplin CW, Stradins P, Landry M, Shub M, Reedy RC, To B, Portugal JV, Mariner JT Thin Solid Films, 519(14), 4585, 2011 |