검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist Winston D, Cord BM, Ming B, Bell DC, DiNatale WF, Stern LA, Vladar AE, Postek MT, Mondol MK, Yang JKW, Berggren KK Journal of Vacuum Science & Technology B, 27(6), 2702, 2009 |
| 2 |
Advanced electron microscopy needs for nanotechnology and nanomanufacturing Postek MT, Villarrubia JS, Vladar AE Journal of Vacuum Science & Technology B, 23(6), 3015, 2005 |
| 3 |
Application of transmission electron detection to SCALPEL mask metrology Farrow RC, Postek MT, Keery WJ, Jones SN, Lowney JR, Blakey M, Fetter LA, Griffith JE, Liddle JA, Hopkins LC, Huggins HA, Peabody M, Novembre A Journal of Vacuum Science & Technology B, 15(6), 2167, 1997 |
| 4 |
Fabrication Issues for the Prototype National-Institute-of-Standards-and-Technology Srm-2090A Scanning Electron-Microscope Magnification Calibration Standard Newell BL, Postek MT, Vanderziel J Journal of Vacuum Science & Technology B, 13(6), 2671, 1995 |