검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Growth and characterization of radio-frequency magnetron sputtered lead zirconate titanate thin films deposited on < 111 > Pt electrodes Ea-Kim B, Aubert P, Ayguavives F, Bisaro R, Varniere F, Olivier J, Puech M, Agius B Journal of Vacuum Science & Technology A, 16(5), 2876, 1998 |
| 2 |
Sidewall and Surface-Induced Damage Comparison Between Reactive Ion Etching and Inductive Plasma-Etching of InP Using a CH4/H-2/O-2 Gas-Mixture Etrillard J, Heliot F, Ossart P, Juhel M, Patriarche G, Carcenac P, Vieu C, Puech M, Maquin P Journal of Vacuum Science & Technology A, 14(3), 1056, 1996 |
| 3 |
Low-Temperature Deposition of Silicon-Nitride Films by Distributed Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition Sitbon S, Hugon MC, Agius B, Abel F, Courant JL, Puech M Journal of Vacuum Science & Technology A, 13(6), 2900, 1995 |