검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma Vasyliev VV, Kalinichenko AI, Reshetnyak EN, Azar GTP, Urgen M, Strel'nitskij VE Thin Solid Films, 642, 207, 2017 |
| 2 |
Effects of frequency of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition Nakazawa H, Kamata R, Miura S, Okuno S Thin Solid Films, 574, 93, 2015 |
| 3 |
Influence of duty ratio of pulsed bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition Nakazawa H, Kamata R, Miura S, Okuno S Thin Solid Films, 539, 134, 2013 |