검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Simulation and experimental determination of the macro-scale layer thickness distribution of electrodeposited Cu-line patterns on a wafer substrate Pantleon K, Van den Bossche B, Purcar M, Bariani P, Floridor G Journal of Applied Electrochemistry, 35(6), 589, 2005 |
| 2 |
Three-dimensional current density distribution simulations for a resistive patterned wafer Purcar M, Van den Bossche B, Bortels L, Deconinck J, Nelissen G Journal of the Electrochemical Society, 151(9), D78, 2004 |