검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ion-enhanced chemical etching of HfO2 for integration in metal-oxide-semiconductor field effect transistors Sha L, Puthenkovilakam R, Lin YS, Chang JP Journal of Vacuum Science & Technology B, 21(6), 2420, 2003 |
| No. | Article |
|---|---|
| 1 |
Ion-enhanced chemical etching of HfO2 for integration in metal-oxide-semiconductor field effect transistors Sha L, Puthenkovilakam R, Lin YS, Chang JP Journal of Vacuum Science & Technology B, 21(6), 2420, 2003 |