화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Improvement of the multi-level cell performance by a soft program method in flash memory devices
Park JK, Lee KH, Pyi SH, Lee SH, Cho BJ
Solid-State Electronics, 94, 86, 2014
2 Characterizations of pulsed chemical vapor deposited-tungsten thin films for ultrahigh aspect ratio W-plug process
Kim SH, Hwang ES, Ha SC, Pyi SH, Sun HJ, Lee JW, Kawk N, Kim JK, Sohn H, Kim J
Journal of the Electrochemical Society, 152(6), C408, 2005
3 Pulsed CVD of tungsten thin film as a nucleation layer for tungsten plug-fill
Kim SH, Hwang ES, Han SY, Pyi SH, Kawk N, Sohn H, Kim J, Choi GB
Electrochemical and Solid State Letters, 7(9), G195, 2004
4 Sidewall oxidation behavior of dichlorosilane-based W-polycide gate
Kim HS, Lee SM, Yeo IS, Lee SD, Pyi SH
Journal of Vacuum Science & Technology B, 19(2), 361, 2001