검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
On monitoring of gas leak in the plasma vacuum process with optical emission spectroscopy Pyun SC, Kwon JH, You SJ, Seong DJ, Kim JH, Shin YH, Shin JS Thin Solid Films, 518(22), 6658, 2010 |
| No. | Article |
|---|---|
| 1 |
On monitoring of gas leak in the plasma vacuum process with optical emission spectroscopy Pyun SC, Kwon JH, You SJ, Seong DJ, Kim JH, Shin YH, Shin JS Thin Solid Films, 518(22), 6658, 2010 |