검색결과 : 15건
| No. | Article |
|---|---|
| 1 |
Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blanks Farys V, Charpin-Nicolle C, Richard M, Robic JY, Muffato V, Quesnel E, Postnikov S, Schiavone P, Besacier M, Smaali R, Naulleau P Journal of Vacuum Science & Technology B, 23(6), 2860, 2005 |
| 2 |
Investigation of nodule growth in ion beam sputtered Mo/Si multilayers Quesnel E, Hue J, Muffato V, Pelle C, Lamy P Journal of Vacuum Science & Technology B, 22(5), 2353, 2004 |
| 3 |
Optical properties of magnesium fluoride thin films produced by argon ion-beam assisted deposition Dumas L, Quesnel E, Pierre F, Bertin F Journal of Vacuum Science & Technology A, 20(1), 102, 2002 |
| 4 |
Thermodynamic calculations of congruent vaporization and interactions with residual water during magnesium fluoride vacuum deposition Dumas L, Chatillon C, Quesnel E Journal of Crystal Growth, 222(1-2), 215, 2001 |
| 5 |
Laser damage studies on MgF2 thin films Protopapa ML, De Tomasi F, Perrone MR, Piegari A, Masetti E, Ristau D, Quesnel E, Duparre A Journal of Vacuum Science & Technology A, 19(2), 681, 2001 |
| 6 |
Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition Dumas L, Quesnel E, Robic JY, Pauleau Y Thin Solid Films, 382(1-2), 61, 2001 |
| 7 |
Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry Tikhonravov AV, Trubetskov MK, Krasilnikova AV, Masetti E, Duparre A, Quesnel E, Ristau D Thin Solid Films, 397(1-2), 229, 2001 |
| 8 |
Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation Dumas L, Quesnel E, Robic JY, Pauleau Y Journal of Vacuum Science & Technology A, 18(2), 465, 2000 |
| 9 |
Optical and microstructural properties of MgF2UV coatings grown by ion beam sputtering process Quesnel E, Dumas L, Jacob D, Peiro F Journal of Vacuum Science & Technology A, 18(6), 2869, 2000 |
| 10 |
Microstructure and composition of MgF2 optical coatings grown on Si substrate by PVD and IBS processes Jacob D, Peiro F, Quesnel E, Ristau D Thin Solid Films, 360(1-2), 133, 2000 |