검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etch Rate and Plasma-Density Radial Uniformity Measurements in a Cusped Field Helicon Plasma Etcher Quick AK, Chen RT, Hershkowitz N Journal of Vacuum Science & Technology A, 14(3), 1041, 1996 |
| No. | Article |
|---|---|
| 1 |
Etch Rate and Plasma-Density Radial Uniformity Measurements in a Cusped Field Helicon Plasma Etcher Quick AK, Chen RT, Hershkowitz N Journal of Vacuum Science & Technology A, 14(3), 1041, 1996 |