검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Controlled Fluxes of Silicon Nanoparticles to a Substrate in Pulsed Radio-Frequency Argon-Silane Plasmas Larriba-Andaluz C, Girshick SL Plasma Chemistry and Plasma Processing, 37(1), 43, 2017 |
| 2 |
Pulsed and continuous wave plasma deposition of amorphous, hydrogenated silicon carbide from SiH4/CH4 plasmas McCurdy PR, Truitt JM, Fisher ER Journal of Vacuum Science & Technology A, 17(5), 2475, 1999 |
| 3 |
Plasma chemistry in fluorocarbon film deposition from pentafluoroethane/argon mixtures Agraharam S, Hess DW, Kohl PA, Allen SAB Journal of Vacuum Science & Technology A, 17(6), 3265, 1999 |
| 4 |
Experimental Check of the High-Frequency Behavior of the Electrons in Molecular and Atomic Gas Plasmas Gundermann S, Winkler R Plasma Chemistry and Plasma Processing, 17(3), 263, 1997 |