화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Nonlinear amplitude evolution during spontaneous patterning of ion-bombarded Si(001)
Erlebacher J, Aziz MJ, Chason E, Sinclair MB, Floro JA
Journal of Vacuum Science & Technology A, 18(1), 115, 2000
2 Influence of O-2(+) Energy, Flux, and Fluence on the Formation and Growth of Sputtering-Induced Ripple Topography on Silicon
Vajo JJ, Doty RE, Cirlin EH
Journal of Vacuum Science & Technology A, 14(5), 2709, 1996