검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of radio-frequency plasma on structure and properties in Ti film deposition by dc and pulsed dc magnetron sputtering Oya T, Kusano E Thin Solid Films, 517(20), 5837, 2009 |
| No. | Article |
|---|---|
| 1 |
Effects of radio-frequency plasma on structure and properties in Ti film deposition by dc and pulsed dc magnetron sputtering Oya T, Kusano E Thin Solid Films, 517(20), 5837, 2009 |