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| No. | Article |
|---|---|
| 1 |
Effects of thermal annealing on the structural, mechanical, and tribological properties of hard fluorinated carbon films deposited by plasma enhanced chemical vapor deposition da Costa MEHM, Baumvol IJR, Radke C, Jacobsohn LG, Zamora RRM, Freire FL Journal of Vacuum Science & Technology A, 22(6), 2321, 2004 |