검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electrochemical Measurements During the Chemical-Mechanical Polishing of Tungsten Thin-Films Kneer EA, Raghunath C, Mathew V, Raghavan S, Jeon JS Journal of the Electrochemical Society, 144(9), 3041, 1997 |
| 2 |
Electrochemistry of Chemical-Vapor-Deposited Tungsten Films with Relevance to Chemical-Mechanical Polishing Kneer EA, Raghunath C, Raghavan S, Jeon JS Journal of the Electrochemical Society, 143(12), 4095, 1996 |