검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species Delabie A, Swerts J, Van Elshocht S, Jung SH, Raisanen PI, Givens ME, Shero EJ, Peeters J, Machkaoutsan V, Maes JW Journal of the Electrochemical Society, 158(5), D259, 2011 |
| 2 |
Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources Ritala M, Kukli K, Rahtu A, Raisanen PI, Leskela M, Sajavaara T, Keinonen J Science, 288(5464), 319, 2000 |