검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ion absorbing stencil mask coatings for ion beam lithography Wasson JR, Torres JL, Rampersad HR, Wolfe JC, Ruchhoeft P, Herbordt M, Loschner H Journal of Vacuum Science & Technology B, 15(6), 2214, 1997 |
| 2 |
Reactive Ion Etching of Silicon Stencil Masks in the Presence of an Axial Magnetic-Field Pendharkar SV, Wolfe JC, Rampersad HR, Chau YL, Licon DL, Morgan MD, Home WE, Tiberio RC, Randall JN Journal of Vacuum Science & Technology B, 13(6), 2588, 1995 |