검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Shallow N+ Junctions in Silicon by Arsenic Gas-Phase Doping Ransom CM, Jackson TN, Degelormo JF, Zeller C, Kotecki DE, Graimann C, Sadana DK, Benedict J Journal of the Electrochemical Society, 141(5), 1378, 1994 |
| 2 |
Arsenic Gas-Phase Doping of Polysilicon Ransom CM, Jackson TN, Degelormo JF, Kotecki D, Graimann C, Sadana DK Journal of Vacuum Science & Technology B, 12(3), 1390, 1994 |