검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Controlled sacrificial sidewall surface micromachining for the release of high length-to-thickness aspect ratio bridges Raum CR, Tait RN, Gauthier R Journal of Vacuum Science & Technology B, 28(6), 1195, 2010 |
| No. | Article |
|---|---|
| 1 |
Controlled sacrificial sidewall surface micromachining for the release of high length-to-thickness aspect ratio bridges Raum CR, Tait RN, Gauthier R Journal of Vacuum Science & Technology B, 28(6), 1195, 2010 |