화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 High-rate reactive high-power impulse magnetron sputtering of transparent conductive Al-doped ZnO thin films prepared at ambient temperature
Rezek J, Novak P, Houska J, Pajdarova AD, Kozak T
Thin Solid Films, 679, 35, 2019
2 Microstructure of hard and optically transparent HfO2 films prepared by high-power impulse magnetron sputtering with a pulsed oxygen flow control
Pi NW, Zhang MH, Jiang JC, Belosludtsev A, Vlcek J, Houska J, Meletis EI
Thin Solid Films, 619, 239, 2016
3 High-rate reactive high-power impulse magnetron sputtering of Ta-O-N films with tunable composition and properties
Rezek J, Vlcek J, Houska J, Cerstvy R
Thin Solid Films, 566, 70, 2014