검색결과 : 3건
No. | Article |
---|---|
1 |
Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon : Surface modification for controlled nucleation Smith LL, Read WW, Yang CS, Srinivasan E, Courtney CH, Lamb HH, Parsons GN Journal of Vacuum Science & Technology A, 16(3), 1316, 1998 |
2 |
Steady infiltration in sloping porous domains: The onset of saturation Tritscher P, Read WW, Broadbridge P, Stewart JM Transport in Porous Media, 31(1), 1, 1998 |
3 |
Real-Time Process Sensing and Metrology in Amorphous and Selective-Area Silicon Plasma-Enhanced Chemical-Vapor-Deposition Using in-Situ Mass-Spectrometry Chowdhury AI, Read WW, Rubloff GW, Tedder LL, Parsons GN Journal of Vacuum Science & Technology B, 15(1), 127, 1997 |