화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon : Surface modification for controlled nucleation
Smith LL, Read WW, Yang CS, Srinivasan E, Courtney CH, Lamb HH, Parsons GN
Journal of Vacuum Science & Technology A, 16(3), 1316, 1998
2 Steady infiltration in sloping porous domains: The onset of saturation
Tritscher P, Read WW, Broadbridge P, Stewart JM
Transport in Porous Media, 31(1), 1, 1998
3 Real-Time Process Sensing and Metrology in Amorphous and Selective-Area Silicon Plasma-Enhanced Chemical-Vapor-Deposition Using in-Situ Mass-Spectrometry
Chowdhury AI, Read WW, Rubloff GW, Tedder LL, Parsons GN
Journal of Vacuum Science & Technology B, 15(1), 127, 1997