검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of copper nitride film and its application to copper seed layer for electrodeposition Park JM, Jin K, Han B, Kim MJ, Jongwan JA, Kim JJ, Lee WJ Thin Solid Films, 556, 434, 2014 |
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of copper nitride film and its application to copper seed layer for electrodeposition Park JM, Jin K, Han B, Kim MJ, Jongwan JA, Kim JJ, Lee WJ Thin Solid Films, 556, 434, 2014 |