검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Surface metal standards produced by ion implantation through a removable layer Schueler BW, Granger CN, McCaig L, McKinley JM, Metz J, Mowat I, Reich DF, Smith S, Stevie FA, Yang MH Applied Surface Science, 203, 847, 2003 |
| 2 |
Defect analysis of Cl-2/HBr/He/O-2 etching process by imaging time-of-flight secondary ion mass spectrometry Zhao J, Reich DF, Nguyen TT, Zhao L, Hossain TZ Journal of Vacuum Science & Technology A, 18(1), 207, 2000 |
| 3 |
Depth scale distortions in shallow implant secondary ion mass spectrometry profiles Schueler BW, Reich DF Journal of Vacuum Science & Technology B, 18(1), 496, 2000 |