검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Actinic extreme ultraviolet mask inspection beyond 0.25 numerical aperture Goldberg KA, Naulleau P, Mochi I, Anderson EH, Rekawa SB, Kemp CD, Gunion RF, Han HS, Huh S Journal of Vacuum Science & Technology B, 26(6), 2220, 2008 |
| 2 |
At-wavelength alignment and testing of the 0.3 NA MET optic Goldberg KA, Naulleau PP, Denham PE, Rekawa SB, Jackson K, Anderson EH, Liddle JA Journal of Vacuum Science & Technology B, 22(6), 2956, 2004 |
| 3 |
Preparations for extreme ultraviolet interferometry of the 0.3 numerical aperture Micro Exposure Tool optic Goldberg KA, Naulleau PP, Denham PE, Rekawa SB, Jackson KH, Liddle JA, Harteneck B, Gullikson E, Anderson EH Journal of Vacuum Science & Technology B, 21(6), 2706, 2003 |