검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Thermal furnace and Ultraviolet assisted curing impact on SiOCH spin-on ultra low dielectric constant materials Zenasnia A, Remiat B, Waldfiied C, Le Cornec C, Jousseaume V, Passemard G Thin Solid Films, 516(6), 1097, 2008 |
| 2 |
Crosslinking impact of mesoporous MSQ films used in microelectronic interconnections on mechanical properties Ciaramella F, Jousseaume V, Maitrejean S, Verdier M, Remiat B, Zenasni A, Passemard G Thin Solid Films, 495(1-2), 124, 2006 |