검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of the Expansion of an Oxygen Microwave Remote Plasma for the Growth of Functional Oxide Thin Films Al Makdessi G, Tabbal M Plasma Chemistry and Plasma Processing, 37(1), 243, 2017 |
| 2 |
저압급속열산화법과 플라즈마확산산화법에 의한 실리콘 산화박막의 제조 고천광, 이원규 Korean Chemical Engineering Research, 46(2), 408, 2008 |