검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Cleaning of patterned porous low-k dielectrics with water, carbon dioxide and ambidextrous surfactants Keagy JA, Zhang XG, Johnston KP, Busch E, Weber F, Wolf PJ, Rhoad T Journal of Supercritical Fluids, 39(2), 277, 2006 |
| No. | Article |
|---|---|
| 1 |
Cleaning of patterned porous low-k dielectrics with water, carbon dioxide and ambidextrous surfactants Keagy JA, Zhang XG, Johnston KP, Busch E, Weber F, Wolf PJ, Rhoad T Journal of Supercritical Fluids, 39(2), 277, 2006 |