검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Novel method for cleaning a vacuum chamber from hydrocarbon contamination Wanzenboeck HD, Roediger P, Hochleitner G, Bertagnolli E, Buehler W Journal of Vacuum Science & Technology A, 28(6), 1413, 2010 |
| 2 |
Evaluation of chamber contamination in a scanning electron microscope Roediger P, Wanzenboeck HD, Hochleitner G, Bertagnolli E Journal of Vacuum Science & Technology B, 27(6), 2711, 2009 |