검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Novel High-Yield Trilayer Resist Process for 0.1 Mu-M T-Gate Fabrication Wakita AS, Su CY, Rohdin H, Liu HY, Lee A, Seeger J, Robbins VM Journal of Vacuum Science & Technology B, 13(6), 2725, 1995 |
| No. | Article |
|---|---|
| 1 |
Novel High-Yield Trilayer Resist Process for 0.1 Mu-M T-Gate Fabrication Wakita AS, Su CY, Rohdin H, Liu HY, Lee A, Seeger J, Robbins VM Journal of Vacuum Science & Technology B, 13(6), 2725, 1995 |