검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Synthesis of SiC Microstructures in Si Technology by High-Dose Carbon Implantation - Etch-Stop Properties Serre C, Perezrodriguez A, Romanorodriguez A, Calvobarrio L, Morante JR, Esteve J, Acero MC, Skorupa W, Kogler R Journal of the Electrochemical Society, 144(6), 2211, 1997 |
| 2 |
Etch-Stop Behavior of Buried Layers Formed by Substoichiometric Nitrogen Ion-Implantation into Silicon Perezrodriguez A, Romanorodriguez A, Morante JR, Acero MC, Esteve J, Montserrat J, Elhassani A Journal of the Electrochemical Society, 143(3), 1026, 1996 |