검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature, fast deposition of metallic titanium nitride films using plasma activated reactive evaporation Valero JAMD, Le Petitcorps Y, Manaud JP, Chollon G, Romo FJC, Lopez A Journal of Vacuum Science & Technology A, 23(3), 394, 2005 |