검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Secondary ion mass spectrometry analysis of implanted and rapid thermal processing annealed wafers for sub-100 nanometer technology Ehrke U, Sears A, Lerch W, Paul S, Roters G, Downey DF, Arevalo EA Journal of Vacuum Science & Technology B, 22(1), 346, 2004 |
| 2 |
Non-destructive probing of interfacial oxidation and nitridation states at RTP Si-oxides Hoffmann P, Schmeisser D, Roters G, Nenyei Z Thin Solid Films, 428(1-2), 216, 2003 |