검색결과 : 1건
No. | Article |
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1 |
Chemical vapor deposition of ruthenium oxide thin films from Ru(tmhd)(3) using direct liquid injection Lee DJ, Kang SW, Rhee SW Thin Solid Films, 413(1-2), 237, 2002 |
No. | Article |
---|---|
1 |
Chemical vapor deposition of ruthenium oxide thin films from Ru(tmhd)(3) using direct liquid injection Lee DJ, Kang SW, Rhee SW Thin Solid Films, 413(1-2), 237, 2002 |