검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect oxygen exposure on the quality of atomic layer deposition of ruthenium from bis(cyclopentadienyl)ruthenium and oxygen Park SJ, Kim WH, Maeng WJ, Yang YS, Park CG, Kim H, Lee KN, Jung SW, Seong WK Thin Solid Films, 516(21), 7345, 2008 |