검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
An innovative design of wafer height and tilt sensor for lithography systems Ruan JR, Hartley J Journal of Vacuum Science & Technology B, 26(6), 2043, 2008 |
| 2 |
Electrostatic chuck fringe field simulation and its impact on electron beam extreme ultraviolet mask patterning Ruan JR, Hartley J Journal of Vacuum Science & Technology B, 24(6), 2861, 2006 |
| 3 |
Polysynthetic twinning in poly (vinylcyclohexane) single crystals and "Fractional" secondary nucleation in polymer crystal growth Alcazar D, Ruan JR, Thierry A, Kawaguchi A, Lotz B Macromolecules, 39(3), 1008, 2006 |