검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Design and performance of an electrothermal MEMS microengine capable of bi-directional motion Kolesar ES, Odom WE, Jayachandran JA, Ruff MD, Ko SY, Howard JT, Allen PB, Wilken JM, Boydston NC, Bosch JE, Wilks RJ, McAllister JB Thin Solid Films, 447, 481, 2004 |
| 2 |
Precision bi-directional motion of a linear mechanical shuttle with an electrothermal microengine Kolesar ES, Jayachandran JA, Odom WE, Ruff MD, Cox LA, Htun T, Stacy TE, Yetto JM Thin Solid Films, 469-470, 450, 2004 |
| 3 |
Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine Kolesar ES, Ruff MD, Odom WE, Jayachadran JA, McAllister JB, Ko SY, Howard JT, Allen PB, Wilken JM, Boydston NC, Bosch JE, Wilks RJ Thin Solid Films, 420-421, 530, 2002 |
| 4 |
Three-dimensional structures assembled from polysilicon surface micromachined components containing continuous hinges and microrivets Kolesar ES, Ruff MD, Odom WE, Howard JT, Ko SY, ALlen PB, Wilken JM, Wilks RJ, Bosch JE, Boydston NC Thin Solid Films, 398-399, 566, 2001 |
| 5 |
In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators Kolesar ES, Ko SY, Howard JT, Allen PB, Wilken JM, Boydston NC, Ruff MD, Wilks RJ Thin Solid Films, 377-378, 719, 2000 |