화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Correlation between texture and mechanical stress durability of thin aluminum films
Nussl R, Jewula T, Ruile W, Sulima T, Hansch W
Thin Solid Films, 556, 376, 2014
2 Growth of highly textured aluminum films on LiTaO3 with optimized titanium intermediate layers
Nussl R, Senft C, Beckmeier D, Jewula T, Ruile W, Sulima T, Hansch W, Eisele I
Thin Solid Films, 519(22), 8154, 2011
3 Fatigue damage in thin film Al interconnects at ultra high frequency: A finite element analysis approach
Eberl C, Spolenak R, Kraft O, Ruile W, Arzt E
Thin Solid Films, 515(6), 3291, 2007