검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low-temperature deposition of SiNx, SiOxNy, and SiOx films from plasma discharge of SiH4 for polycarbonate glazing applications Lee SE, Park YC Thin Solid Films, 636, 34, 2017 |
| 2 |
New-type microwave plasma source excited by azimuthally symmetric surface waves with magnetic multicusp fields Tuda M, Ono K Journal of Vacuum Science & Technology A, 16(5), 2832, 1998 |