검색결과 : 2건
No. | Article |
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1 |
Epitaxial growth of TiN films by N-implantation into evaporated Ti films Kasukabe Y, Saito N, Suzuki M, Yamada Y, Fujino Y, Nagata S, Kishimoto M, Yamaguchi S Journal of Vacuum Science & Technology A, 16(6), 3366, 1998 |
2 |
Epitaxy of Titanium Nitride Thin-Films Grown by Nitrogen Implantation Kasukabe Y, Ootubo J, Takeda S, Nagata S, Kishimoto M, Fujino Y, Yamaguchi S, Yamada Y Thin Solid Films, 281-282, 32, 1996 |