화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Epitaxial growth of TiN films by N-implantation into evaporated Ti films
Kasukabe Y, Saito N, Suzuki M, Yamada Y, Fujino Y, Nagata S, Kishimoto M, Yamaguchi S
Journal of Vacuum Science & Technology A, 16(6), 3366, 1998
2 Epitaxy of Titanium Nitride Thin-Films Grown by Nitrogen Implantation
Kasukabe Y, Ootubo J, Takeda S, Nagata S, Kishimoto M, Fujino Y, Yamaguchi S, Yamada Y
Thin Solid Films, 281-282, 32, 1996