검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Magnification correction by changing wafer temperature in proximity x-ray lithography Aoyama H, Mitsui S, Taguchi T, Tanaka Y, Matsui Y, Fukuda M, Suzuki M, Haga T, Morita H Journal of Vacuum Science & Technology B, 17(6), 3411, 1999 |