검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Thermochemical stability of silicon-oxygen-carbon alloy thin films: A model system for chemical and structural relaxation at SiC-SiO2 interfaces Wolfe DM, Hinds BJ, Wang F, Lucovsky G, Ward BL, Xu M, Nemanich RJ, Maher DM Journal of Vacuum Science & Technology A, 17(4), 2170, 1999 |