검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Prototype raster multibeam lithography tool Coyle ST, Holmgren D, Chen X, Thomas T, Sagle A, Maldonado J, Shamoun B, Allen P, Gesley M Journal of Vacuum Science & Technology B, 20(6), 2657, 2002 |
| 2 |
Basic constraints for a multibeam lithography column Mankos M, Coyle S, Fernandez A, Sagle A, Owens W, Sullivan J, Chang THP Journal of Vacuum Science & Technology B, 19(2), 467, 2001 |
| 3 |
Electron-electron interactions in multibeam lithography columns Mankos M, Sagle A, Coyle ST, Fernandez A Journal of Vacuum Science & Technology B, 19(6), 2566, 2001 |
| 4 |
Progress toward a high-brightness photoemission source for multiple-electron beam lithography Coyle ST, Fernandez A, Janaway G, Sagle A, Mankos M Journal of Vacuum Science & Technology B, 19(6), 2581, 2001 |
| 5 |
Multisource optimization of a column for electron lithography Mankos M, Coyle S, Fernandez A, Sagle A, Allen P, Owens W, Sullivan J, Chang THP Journal of Vacuum Science & Technology B, 18(6), 3010, 2000 |
| 6 |
Aerial image slope and proximity effects on critical dimensions in mask lithography Sagle A, Gesley M, Kao H, Innes R Journal of Vacuum Science & Technology B, 16(6), 3563, 1998 |