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| No. | Article |
|---|---|
| 1 |
Causes of Anomalous Solid Formation in the Exhaust Systems of Low-Pressure Chemical-Vapor-Deposition and Plasma-Enhanced Chemical-Vapor-Deposition Semiconductor Processes Abreu RA, Troup AP, Sahm MK Journal of Vacuum Science & Technology B, 12(4), 2763, 1994 |