검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-rate deposition of hydrogenated amorphous silicon films using inductively coupled silane plasma Sakikawa N, Shishida Y, Miyazaki S, Hirose M Solar Energy Materials and Solar Cells, 66(1-4), 337, 2001 |
| No. | Article |
|---|---|
| 1 |
High-rate deposition of hydrogenated amorphous silicon films using inductively coupled silane plasma Sakikawa N, Shishida Y, Miyazaki S, Hirose M Solar Energy Materials and Solar Cells, 66(1-4), 337, 2001 |