검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Application of a High-Throughput Electron-Beam System for 0.3 Mu-M Large-Scale Integration Mizuno F, Kato M, Hayakawa H, Sato K, Hasegawa K, Sakitani Y, Saitou N, Murai F, Shiraishi H, Uchino SI Journal of Vacuum Science & Technology B, 12(6), 3440, 1994 |
| 2 |
Continuous Writing Method for High-Speed Electron-Beam Direct Writing System HL-800D Kawano M, Mizuno K, Yoda H, Sakitani Y Journal of Vacuum Science & Technology B, 11(6), 2323, 1993 |