검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron-Cyclotron-Resonance Sputter Removal of SiO2 on Silicon-Wafers Gopinath V, Salbert GT, Grotjohn TA, Reinhard DK Journal of Vacuum Science & Technology B, 11(6), 2067, 1993 |
| No. | Article |
|---|---|
| 1 |
Electron-Cyclotron-Resonance Sputter Removal of SiO2 on Silicon-Wafers Gopinath V, Salbert GT, Grotjohn TA, Reinhard DK Journal of Vacuum Science & Technology B, 11(6), 2067, 1993 |