검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Performances by the electron optical system of low energy electron beam proximity projection lithography tool with a large scanning field Kasahara H, Shishido T, Samoto N, Shimazu N Journal of Vacuum Science & Technology B, 23(6), 2754, 2005 |
| 2 |
Polymer structure effect on dissolution characteristics and acid diffusion in chemically amplified deep ultraviolet resists Itani T, Yoshino H, Hashimoto S, Yamana M, Samoto N, Kasama K Journal of Vacuum Science & Technology B, 15(6), 2541, 1997 |
| 3 |
Investigation of the notching effect for single layer deep ultraviolet resist processing Yoshino H, Itani T, Hashimoto S, Yamana M, Yoshii T, Samoto N, Kasama K Journal of Vacuum Science & Technology B, 15(6), 2601, 1997 |
| 4 |
A Study of Acid Diffusion in Chemically Amplified Deep-Ultraviolet Resist Itani T, Yoshino H, Hashimoto S, Yamana M, Samoto N, Kasama K Journal of Vacuum Science & Technology B, 14(6), 4226, 1996 |
| 5 |
Sub-0.1-Mu-M T-Shaped Gate Fabrication Technology Using Mixing-Layer Sidewalls in a Double-Layer Resist System Samoto N, Miura I, Makino Y, Yamanoguchi K Journal of Vacuum Science & Technology B, 12(6), 3673, 1994 |